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Wafer Support System(WSS) For TSV
We provide thin Wafer Support System(WSS) that is used for TSV in semiconductor industry. It has superior bonding and de-bonding properties with high thermal resistance and high purity level after cleaning.  

Application
• 3D TSV packaging for Semiconductor

Characteristics
• Non-pressurized Bonding
• Bonding / De-bonding (Mechanical) process: Under Room Temperature
• High thermal resistance Adhesive: 250°C
• Controlling squeeze out / void issue from Adhesive at back side process
• Can be applied high topography as C4 bump: >100 um   

Concept of the process 



Industries
Semiconductor TSV